ESC(Electro Static Chuck)

ESC(LAM / AMAT / TEL)

Refurbishment	Failure mode	Service
L1	Surface roughness or flatness	Surface treatment
L2	Bonding layer	L1 + Re-bonding
L3	Crack or chipping on the ceramic plate	L2 + New plate
L0	-	Brand new

LAM Dielectric Oxide 12"

2300 Exelan / 2300 Flex / 2300 Flex 45 / 2300 Flex EX / 2300 Flex GX

LAM Conductor Poly/Metal 12"

2300 Versys Star / 2300 Versys Kiyo / 2300 Kiyo CX(EX) / 2300 B51Kiyo CX(EX) / 2300 Kiyo FX

AMAT Dielectric Oxide 12"

e-Max CT+ / e-Max 300 / Producer e / Producer(Georgia)

AMAT Conductor Poly/Metal 12"

DPS II / DPS G2/OPUS / DPS G3 / Mesa G5 / Mesa SYM3/SYM4/Black Hawk

AMAT HDP-CVD 12"

Ultima

AMAT Implant 12"

Viista 12"(AP1/3.0", AP2/3.0", AP1/4.8", AP2G)

Axcelis Implant 12"

Axcelis 12"

LAM Dielectric Oxide 6"

Rainbow 4520i

LAM Dielectric Oxide 8"

TCP 9400/9600/4720

Rainbow 4520i / Exelan HP / 2300 Flex / Kiyo 45

AMAT Dielectric Oxide 8"

Super e / e-Max / DPS+

AMAT Conductor Poly/Metal

DPS / DPS+ / MXP Metal / DPS II

AMAT HDP-CVD 6"

Ultima

AMAT HDP-CVD 8"

TEL Dielectric Oxide 8"

SCCM / DRM